| Maximum load | 2 Kg |
| Maximum speed | 2 m/s |
| Maximum acceleration | 2 g |
| Repeat positioning accuracy | X:±0.01 mm Y:±0.01 mm Z:±0.1 mm RX:±0.5° RY:±0.5° RZ:±1° |
| Location detection | Absolute value position feedback |
| Communication interface | EtherCAT & Ethernet |
| Controller/Driver | XiCS-CH/ XiCS-DX |
| Controller power supply | 24VDC |
| Driver power supply | 55VDC & 220VAC 3PH |